Nanotechnology at Zyvex

Offers 90 and 65 nanometer node probing capabilities

Richardson, Texas (April 2, 2004)

Zyvex Corporation today announced a breakthrough probing application for integrated circuit (IC) defect analysis. Zyvex enables rapid-response semiconductor device failure analysis at the contact level for better, faster, and cheaper IC development — features that are critical to the highly-competitive semiconductor industry.

Four probe contact on an n-channel MOSFET. The gate probe is connected to the pass-gate shared by four n-channel transistors. The Psub probe is connected to the substrate contact and the S/D probes are connected to the source and drain of the transistor being tested. The system is capable of connecting the contacts that are separated by as little as 70 nanometers and as large as 10 millimeters.

Zyvex’s new IC probing application is targeted directly to the semiconductor industry. Distinguishing features include: Contact level probing (90 and 65 nanometer nodes); installation in both scanning electron microscopes and focused ion beam systems; 5 nanometer movement control; low contact resistance; stable, accurate IV measurements; low noise (1pA measurement capability); and a contamination control system. Zyvex is so confident of its IC probing advantages, it offers to test customers’ sample devices, present results, and prove the benefits.

“This new application is targeted at semiconductor firms looking for a competitive advantage in the development of next generation chips,” said Zyvex President, Thomas A. Cellucci, PhD, MBA. “We have leapfrogged the current competition by offering a solution that's easy to install, quick to produce results and payback, and enhances the equipment that companies already have. Global semiconductor firms can’t afford to be without this application if they want to stay ahead of the pack.”

An application note entitled “Probing Transistors at the Contact Level in Integrated Circuits” is available on the Zyvex web site. Other available application notes show the power and versatility of Zyvex's NanoWorks™ Product Line, NanoEffector™ Tools, and Nanomaterials Products and Capabilities.

The new IC100 Probing application is an integral part of Zyvex’s mission of providing flexible, automated manufacturing at ever decreasing size scales.

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