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| EBIC: Electron
Beam Induced Current |
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- The probe is used as a current imaging
device through a medium gain amplifier.
- Higher bandwidth
for faster imaging rates.
- Used to characterize PN
junctions and their dopant quality.
- Can be used for
planar EBIC or cross-sectional EBIC.
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| EBAC:
Electron Beam Absorbed Current |
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- The probe is used as a current imaging
device through a high gain amplifier.
- The user is looking for breaks
in metal lines that may be buried up to 3 or 4
layers deep.
- A quantitative form
of active voltage contrast.
- Can achieve femto-level
sensitivity.
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