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• Number of positioners: 1 to 4
• X, Y, Z course resolution: 100 nm open loop
• X, Y, Z fine resolution: <5 nm open loop
• X, Y, Z range of motion: 12 mm
• Degrees of freedom: 3
• I/O per positioner: 5
• Top speed: 3 mm/s
• Max sample size: 12 mm X 12 mm X 4 mm
• Windows-based operating system
• PC controller software
• Joystick
• 5 BNC I/O Channels per positioner
• User installable and removable
• Custom mount design on SEM stage
• Single electrical feedthrough
• Better than 50 nm tip radius
• Smooth taper to tip
• 99.9% pure tungsten
• Range of motion: 12 mm
• Resolution: 100 nm
• Compatible with load lock integration package
• Max sample size: 12 mm X 12 mm X 4 mm
• Operating voltage: 100–240V AC Input/ 50–60Hz
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