Zyvex dProber™ The Door-Mountable Solution for the
Semicondutor Failure Analysis Industry
Positioners
• Number of Positioners: 6
• X, Y, Z coarse resolution: 100 nm open loop
• X, Y, Z fine resolution: 5 nm open loop
• X, Y, Z range of motion: 10 mm
• Degrees of Freedom: 3
• I/O per positioner: 5
Center Stage
• X, Y Range of motion: 25 mm
• Z Range of motion: 12 mm
• X, Y, Z resolution: 100 nm open loop
• Max Sample Size: 12 mm X 12 mm X 4 mm
Electrical Measurement
Capabilities
• 0.1 fA resolution
• Better than 200 fA accuracy
• Max Voltage per positioner: 100 V
• Max Current per positioner: 200 ma
Software and Control
• Windows-based operating system
• Joystick movement
• DC measurement module
• Anti-contamination system module
• Load lock module
• Scripting engine
• Data archiving module (DataViewer)
