Zyvex sProber™ The Installable and Removable Solution
for the
Semicondutor Failure Analysis Industry
Positioners
• Number of Positioners: 4
• Open Loop
• X, Y, Z course resolution: 100 nm open loop
• X, Y, Z fine resolution: 5 nm open loop
• X, Y, Z range of motion: 12 mm
• Degrees of Freedom: 3
• I/O per positioner: 5
Center Stage
• Z Range of motion: 12 mm
• Z resolution: 100 nm
• Load-lock sample exchange: Yes
• Max Sample Size: 12 mm X 12 mm X 4 mm
Electrical Measurement
Capabilities
• 0.1 fA resolution
• Better than 10 pA accuracy
• Max Voltage per positioner: 100 V
• Max Current per positioner: 200 ma
Software and Control
• Windows-based operating system
• Joystick movement
• DC measurement module
• Anti-contamination system module
• Scripting engine
• Data archiving module (DataViewer)
