Zyvex sProber™
The Installable and Removable Solution for the
Semicondutor Failure Analysis Industry

Positioners
• Number of Positioners: 4
• Open Loop
• X, Y, Z course resolution: 100 nm open loop
• X, Y, Z fine resolution: 5 nm open loop
• X, Y, Z range of motion: 12 mm
• Degrees of Freedom: 3
• I/O per positioner: 5

Center Stage
• Z Range of motion: 12 mm
• Z resolution: 100 nm
• Load-lock sample exchange: Yes
• Max Sample Size: 12 mm X 12 mm X 4 mm

Electrical Measurement Capabilities
• 0.1 fA resolution
• Better than 10 pA accuracy
• Max Voltage per positioner: 100 V
• Max Current per positioner: 200 ma

Software and Control
• Windows-based operating system
• Joystick movement
• DC measurement module
• Anti-contamination system module
• Scripting engine
• Data archiving module (DataViewer)

Load Lock Integration
• Custom sample holder and exchange piece
• Scripted procedure (if required)

System
• Operating Voltage: 220V and 115V
• Facilities: Air/Nitrogen: Nitrogen and 80%Oxygen/20%Argon mix