Zyvex is making a significant investment in MEMS as an enabling technology for the top-down approach to nanotechnology. The following photos and movies are MEMS built using the MUMPS process. We have recently partnered with Honeywell International, Inc. to produce more complex MEMS componentry and assembled micro-systems.
We are actively recruiting staff for the top-down assembly group to carry this work forward. If you are interested in applying for a postion, please go to the Zyvex Jobs page.
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Video of a thermal bimorph driven by a 60 Hz square wave with a 10 volt amplitude. The slow oscillating appearance is a result of the interaction between the video rate scan frequency and the driving frequency of the actuator.
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Video of two tungsten probes folding a hinged structure and snapping it into a vertical position.
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In this clip the rotator is being driven at several rotations per minute. This clip also shows that the stage can be rotated in both directions.
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This clip shows the entire rotational stage being driven by opposing XY stages. This stage has no hub and is completely released from the substrate. Removable tethers, the four structures in the center of the rotating wheel, hold the rotational stage in place during the release process.
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This clip provides a closer view of the gear teeth on the wheel interacting with the stepper teeth on the XY actuators.
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This clip shows a scratch drive actuator moving in a circular path due to polysilicon guide rails. A series of electrostatic pulses causes the actuator to take very small ( ~ 30 nm) steps.
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This clip shows a thermal actuator designed to produce angular motion of a center support structure. This actuator may be useful for driving a ratcheting rotational stage.
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This clip shows another scratch drive actuator. Two polysilicon guide rails keep the actuator moving in a straight line.
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Here we have a standard thermal bimorph that is 300 microns long. The end of the bimorph is moving approximately 14 microns.
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This
clip shows a bi-directional actuator.
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This
clip shows another bi-directional actuator.
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