MEMS at Zyvex

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Click on the image to view the RealPlayer video. You must have RealPlayer Video to view the streaming version. If you don't have the application, you can download RealPlayer Basic (free of charge) directly from the RealPlayer site.

You can also download the MPEG version, by clicking "Download the MPEG movie."

 

Fully released tweezer in failure mode (bending out of plane).

Tweezers are less than 400um long and are attached to a small PCB by wire bonding technique.

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Close up of another fully released tweezer in failure mode (broken brace).

These tweezers were damaged during release yet function quite well.

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Silhouette of fully released and working tweezers operating at 1Hz 10V square wave signal.

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Close-up of tips from tweezer above.
Gap between tips is 30um.

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Tweezers scanning above MEMS die site.

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Same tweezers attempting to pick up 70umX35um ZyBloks™.

Movie also shows side view.

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Positive-Negative-Z out of plane actuator moving about 8um out of plane.

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Last update: September 24, 2001

 

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