eBeam CAP

» features
» specifications
» how it works

» datasheet

.............................

other products

» nProber
» dProber
» sProber
» s200
» probes
» microgrippers

apps packages
» low noise
» temp
» characterization
» e-beam
   current analysis

 

 

 

 

Zyvex E-Beam Current Analysis Package
Probe-assisted SEM Characterization

Components and Control
• Standard Low Noise package (sold separately)
• PC-based software intalled on Zyvex PC
• 2-stage amplifier
• Scan controller
• Interface cabling available for SEMs
 Electronics Capabilities EBIC EBAC
 Transimpendance 103 108
 Bandwidth (kHz) 200 - 500 1.2 - 50
 Resolution Better than 5 fA Better than 5 fA
 Accuracy Better than 200 fA Better than 5 fA
 Bias voltage +/- 10V +/- 10V
     
 Imaging Capabilities EBIC EBAC
 Resolution Better than 10nm Better than 5nm
 Acg time Reaction - 60s 30s - 540s
 Pixel resolution 8000 pixels per line 8000 pixels per line
 Pixel dwell time 400nsec - 400msec 400nsec - 400msec
 Bytes/pixel 1, 2, 4 (user selectable) 1, 2, 4 (user selectable)
     
© Copyright 2007-2010, Zyvex Instruments. All Rights Reserved.
Zyvex Home Page
Zyvex News
Zyvex Products
About Zyvex
Contact Zyvex