Zyvex dProber™
The Door-Mountable Solution for the Semicondutor Failure Analysis Industry

The Zyvex dProber™, part of the NanoWorks® Tools product line, is designed and optimized to electrically probe sub-100nm features on semiconductor devices with increased throughput and ease of use.

The system consists of a state-of-the-art, six positioner Zyvex Nanomanipulator and XYZ sample stage, a parametric analyzer, an advanced anti-contamination system, an industrial grade load lock, and custom software to control and integrate each component.

The dProber is a standard system mounted on a custom door designed to replace the door of the customer’s Scanning Electron Microscope (SEM) or Focused Ion Beam (FIB) System. The dProber can be coupled with a new SEM/FIB or with an existing SEM/FIB to reduce the total cost to the customer.
The system has six positioners with 5 nm resolution of movement. The user manipulates the probes and positioners using a high precision Hall Effect joystick. The software provides accurate control by tuning the motors and joystick to each user’s preference.

The center sample stage moves independently of the probes in the XYZ directions for higher throughput and easier site-to-site navigation. This greatly reduces the amount of probe movements and consequently increases probe lifetime. The load lock is mounted on the Zyvex door and is designed for quick transfer of samples in an ultra-clean environment.

An easy-to-use Windows-based software platform seamlessly integrates all of the components of the dProber. The software also provides instant feedback to the user and a powerful scripting engine.

The dProber’s electrical characterization system is specifically designed for low-noise measurements. Our most advanced anti-contamination system rigorously cleans the SEM/FIB, enabling the user to achieve superior ohmic contact. The dProber increases throughput and provides for more applications than the usual four-positioner system.

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