Zyvex nProber™
The Complete Solution for the Semicondutor Failure Analysis Industry

Positioners
• Number of Positioners: 8
• Closed Loop
• X, Y, Z course resolution: 1-micron encoded
• X, Y, Z fine resolution: 5 nm open loop
• X, Y, Z range of motion: 12 mm
• Degrees of Freedom: 3
• I/O per positioner: 5

Center Stage Range of Motion
• X: 28 mm Y: 28 mm Z: 13 mm
• X, Y, Z resolution: 5 nm encoded
• X, Y, Z accuracy: less than 200 nm over a 1 mm distance.
• X, Y, Z repeatability: Point to point repeatability is better than 100nm
• Navigation Method: Point/Click, Joystick, and CAD navigation software
• Load-lock sample exchange: Yes
• Max Sample Size: 12 mm X 12 mm X 4 mm

Electrical Measurement Capabilities/Keithley 4200
• 0.1 fA resolution
• Better than 200 fA accuracy
• Max Voltage per positioner: 100 V
• Max Current per positioner: 200 ma
• Resistance per line: Less than 10 ohms

Software and Control
• Windows-based operating system
• Joystick movement
• Point/Click navigation for center stage and software
• CAD navigation capable
• Step-by-Step IC probing user interface
• Data archiving module (DataViewer)

SEM Enhancements
• Greater than +/- 100 microns of beam shift
• Knob-based user control board
• Completely dry-pumped with two scroll pumps
• Industrial-designed UHV load-lock
• Flood ion gun in-situ cleaning package
• Advanced sample and chamber cleaning system

System: Prober + SEM
• Operating Voltage: 220V and 115V
• Facilities: Air/Nitrogen: Nitrogen and 80%Oxygen/20%Argon mix